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USA, California, San Jose, 95134, 4000 North First Street
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Richard S. Hill
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Novellus Systems, Inc.
Novellus Systems Inc. develops, manufactures, sells, and services semiconductor equipment used in the fabrication of integrated circuits. It is a leading supplier of chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), physical vapor deposition (PVD), electrochemical deposition (ECD), ultraviolet thermal processing (UVTP), and surface preparation equipment used in the manufacturing of semiconductors.
In stock
These documents may be viewed on the Novellus InfoSource website.
Group: Software
In stock
High-density plasma (HDP) CVD technology provides a void-free gap fill of high-quality dielectric films in high aspect ratio device structures. Novellus' HDP products are distinguished by their superior throughput and reliability. The unique source design of our HDP systems prevents device damage...
Group: UV illuminators
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Novellus Software Engineering is focused on communicating key product information to all of our customers. The Novellus Software web pages are designed to provide:
Timely and useful information regarding Novellus software products for both existing and potential Novellus customers. A convenient...
Group: Software
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The INOVA® delivers leading-edge PVD technology that is critical to the production of sub-32 nm logic and memory devices.
Group: Semi-conductor modules
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As interconnect structures migrate toward smaller feature sizes, issues involving surface preparation become one of the primary barriers to the extendibility and reproducibility of deposition processes. Residual contamination from improperly prepared surfaces can affect the deposition and adhesion...
Group: Microcircuits integrated
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Novellus is the leader in tungsten chemical vapor deposition technology for plug fill and low-stress composite interconnects. For metal CVD applications we combine our productive multistation sequential deposition architecture with process innovations such as high-pressure nucleation, resistive...
Group: Microcircuits integrated
